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Membrane thickness measurement for ceramic pressure sensors

Every part measured and classified without contact, at ±1.5 µm at 3σ, in under three seconds.

Sensors & Metrology

01Starting point

The membrane of a ceramic pressure sensor determines the sensor measuring range and sensitivity, and is ground to an accuracy of just a few micrometres. The catch: the grinding process scatters more widely than a single product class can handle. Sampling would have been too risky. Every single part had to be measured without contact, at ±1.5 µm at 3σ, in under three seconds, even on the rough, sintered back side.

02Approach

With two chromatic-confocal sensors facing each other, scanning the membrane from above and below at the same time. The result is an actual thickness instead of a distance that depends on how the part is held. Granite instead of steel, air damping instead of vibration, vacuum instead of clamps, plus a PLC/PC control system that cleanly separates axis movement, measurement and classification.

03Result

Scatter turns into yield: instead of scrap, you get up to four sellable classes. Full inspection instead of sampling, misplacements are flagged immediately, and every measurement stays traceable all the way back to the order. The target bin lights up via LED, placement is monitored, and a misplacement triggers an alarm.

What is inside

A complete, operator-guided measuring station: five measuring points per part, four classification bins plus reject, LED display, PLC/PC control, plus all the paperwork right along with it, meaning CE, EN 60204-1, maintenance plan, spare parts list and calibration standards.

What happened next

It started with a feasibility study on the measuring principle and on how much the surface topography limits the achievable accuracy. After that came a second classification method based on pressure-dependent membrane deflection, plus a system for seamless traceability of all measurement data.

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