// Showcase
A machine that replicates a 200 × 250 mm² unit cell across areas up to 1740 × 1300 mm², measuring every process parameter instead of guessing at it.
Micro- and nanostructures, meaning holographic gratings, microlens arrays and diffractive elements, are best written small, because costs explode with area. So you replicate a perfect unit cell field by field. That sounds simple, but it is a mechanical problem: the previous machine set curing energy, roller forces and resist volume by hand, and had no Z-axis at all. A substrate thickness variation of just ±30 µm produced up to 14.1 µm of offset, against a ±5 µm requirement.
We built a 200 kg head that combines dispensing, pressing, curing and optical inspection in a single assembly, rigidly mounted to a granite gantry that travels over a granite table. We design vibration and thermal drift out instead of compensating for them afterwards. That gets us axis accuracy under ±5 µm over a 1600 × 1400 mm² travel range and ±5 arcsec angular accuracy, verified interferometrically per ISO 230-2.
Every process value, from roller force through dispensing pressure and curing energy to tool angle, is set as a recipe value and logged right alongside the result. Recipes, jobs, measurements and events all land in a database, viewable by role and connectable to the MES. And because two magnification stages plus a confocal distance sensor sit right in the head, the machine measures its own geometry, fiducial position, substrate height and layer thickness itself. No second measuring station needed.
A platform for substrates up to 1740 × 1300 mm² and 0.5 to 5 mm thick. Twelve independently switchable vacuum segments hold both foil and plate flat, and the chuck plate is swappable. The head dispenses via needle, presses at 15 to 320 N with 0.37 N setpoint accuracy, and cures with a swappable source at 365, 405 or 435 nm. A fully automatic calibration sequence monitors itself and corrects things like gantry squareness, with no service technician on site.
We shipped the machine in modules and reassembled it in the finished cleanroom. And we do not stop after handover: diagnostics via logs and dashboard, some of it remote, including a documented motor swap. Years of uptime is part of what we deliver.
Get in touch
You bring the challenge. We develop the solution. From the first idea through concept and development to the validated machine, we guide your project.